פז"מ-טק (1991) בע"מ

PaZaM-tech (1991) Ltd


NanoStages

for Beam Steering, Scanning & Positioning

מערכות מותאמות לצרכיך תוך 45-30 יום

Customized Stages Delivered 30-45 Days ARO with NO NREs!

No RFP? to download a copy of our "How To RFP a Nano Stage", click here.

UHV? nearly all standard systems can be modified for vacuum applications to 10(-8) Torr if baking is not necessary.

PDF? to download a copy of our Products Table in PDF format, click here.

Techy? read about our technology here

ON THIS PAGE:
Beam Steering
Microscope Objective Focusing
UHV (bakeable) NanoPositioners
θz . NanoPositioners (Rotational)
Z . NanoPositioners (Linear)
Z . θx . θy . NanoPositioners (Z-axis Linear + Tip + Tilt)
X . NanoPositioners
X . Y . NanoPositioners
X . Y . Z . NanoPositioners
X . Y . Z . θx . θy . NanoPositioners (3-axis Linear + Tip + Tilt)
X . Y . Z . θx . θy . θz . NanoPositioners (3-axis Linear + Tip + Tilt + Rotation)
MicroPositioning Stages - XY Axis
Integrated NanoPositioning / MicroPositioning Stages

Beam Steering

Range of Motion Resolution Overall Dimensions Applications Model PDF
2 mradian 4.0 nradian 51 x 32 x 13 mm Single axis beam steering Nano-Theta
2 mradian 4.0 nradian 25.4 (1") diameter x 32 mm High speed, single axis laser beam steering Nano-MTA
5 mradian 10 nradian 25.4 (1") diameter x 32 mm High speed, single axis laser beam steering Nano-MTAX
2 mrad x 2 mrad 4.0 nrad x 4.0 nrad 53 x 51 x 43 mm High speed, 2-axis laser beam steering Nano-MTA2
5 mrad x 5 mrad 10 nrad x 10 nrad 53 x 51 x 43 mm High speed, 2-axis laser beam steering Nano-MTA2X

Microscope Objective Focusing

Range of Motion Resolution Overall Dimensions Applications Model PDF
100 μm 0.2 nm 43 x 41 x 44 mm Automatic microscope focus drift correction C-Focus
100 μm 0.2 nm 43 x 41 x 44 mm Objective lens focusing element Nano-F100
200 μm 0.4 nm 51 x 43 x 47 mm Objective lens focusing element Nano-F200
450 μm 0.9 nm 114 x 65 x 25 mm Objective lens focusing element Nano-F450
30 - 100 μm 0.06 - 0.2 nm Variety of custom designs High speed lens focusing elements Nano-OP series

UHV (bakeable) NanoPositioners

Range of Motion Aperture Overall Dimensions Special Features Model PDF
50 μm (XY) 25.4 mm (1") diameter 64 x 64 x 33 mm Vacuums to 10(-10) Torr, bakeable to 120°C Nano-UHV50
100 μm (XY) 66 x 66 mm 140 x 140 x 28 mm Vacuums to 10(-10) Torr, bakeable to 120°C Nano-UHV100
200 μm (XY) 51 x 51 mm 135 x 191 x 36 mm Vacuums to 10(-10) Torr, bakeable to 120°C Nano-UHV200

θz . NanoPositioners (Rotational)

Range of Motion Aperture Overall Dimensions Special Features Model PDF
2 mrad none 51 x 32 x 13 mm Small, accessible rotation axis Nano-Theta
5 mrad 35 mm (1.378”) diameter 127 x 127 x 13 mm Low profile, large aperture Nano-Theta-H

Z . NanoPositioners (Linear)

Range of Motion Aperture Overall Dimensions Special Features Model PDF
10 μm no 51 x 51 x 32 mm Compact size, highest speed Nano-HSZ
25 μm 6 mm (0.25”) diameter 64 x 56 x 20 mm Compact size with aperture Nano-MZ
200 μm no 64 x 64 x 27 mm Long range motion Nano-CZ200
500 μm 13 mm (0.5”) diameter 127 x 127 x 33 mm Long range motion Nano-CZ500
100 μm to 200 μm 66 x 66 mm 133 x 127 x 20 mm Large aperture for MICROSCOPY Nano-Z series
500 μm 102 x 152 mm 210 x 178 x 19 mm Holds multiwell plates Nano-Z500

Z . θx . θy . NanoPositioners


Z-axis Linear + Tip + Tilt

Range of Motion Aperture Overall Dimensions Special Features Model PDF
25 μm x 1 mrad x 1 mrad 6 mm (0.25”) diameter 64 x 56 x 20 mm Smallest Z-θX-θY stage Nano-M3Z
100 μm x 2 mrad x 2 mrad 66 x 66 mm 133 x 127 x 20 mm Low profile, large aperture Nano-Align3-100
200 μm x 4 mrad x 4 mrad 66 x 66 mm 133 x 127 x 20 mm Low profile, large aperture Nano-Align3-200

X . NanoPositioners

Range of Motion Aperture Overall Dimensions Special Features Model PDF
10 μm no 38 x 25 x 10 mm Smallest 1-axis stage Nano-Mini
15 μm to 70 μm no 20 mm diameter x 33-79 mm Unique tubular design Nano-P series
30 μm to 100 μm Optional up to 32 mm diameter 51 x 13 x 70-122 mm Fast, small, versatile Nano-OP series
200 μm no 108 x 76 x 18 mm Lowest out of plane motion Nano-LR200
500 μm 10 x 65 mm 86 x 120 x 15 mm Long range motion Nano-YT500
50 μm to 200 μm no 152 x 114 x 50 mm Heavy load capability Nano-HL series

X . Y . NanoPositioners

Range of Motion Aperture Overall Dimensions Special Features Model PDF
10 μm (XY) none 51 x 51 x 29 mm Fast, high resolution Nano-HS series
50 μm (XY) 13 mm (0.5”) diameter 53 x 53 x 28 mm Smallest 2-axis stage with aperture Nano-M250
50 μm (XY) 89 x 89 mm 226 x 226 x 32 mm Large load capacity (5 kg) Nano-Max50
50 μm (XY) to 100 μm (XY) 51 x 51 102 x 102 x 33 mm Compact size with aperture Nano-H series
50 μm (XY) to 200 μm (XY) 66 x 66 mm 121 x 121 x 13 mm (0.5”) Low profile, aperture, Invar or Ti Nano-Bio2M
50 μm (XY) to 75 μm (XY) 66 x 66 mm 114 x 114 x 28 mm High speed, large aperture Nano-PDQ series
100 μm (XY) to 200 μm (XY) 66 x 66 mm 127 x 127 x 33 mm Economical with large aperture Nano-T series
100 μm (XY) to 200 μm (XY) 66 x 66 mm 152 x 152 x 15 mm Low profile with large aperture Nano-Bio series
100 μm (XY) to 300 μm (XY) 84 x 53 mm 152 x 203 x 15 mm Low profile, aperture for 3” slides Nano-BioS series

X . Y . Z . NanoPositioners

Range of Motion Aperture Overall Dimensions Special Features Model PDF
10 μm (XYZ) none 51 x 51 x 51 mm Fast, high resolution Nano-HS series
50 μm x 50 μm x 25 μm 6 mm (0.25”) diameter 64 x 56 x 48 mm Smallest 3-axis stage with aperture Nano-M350
200 μm (XYZ) none 64 x 64 x 52 mm Compact, long range, low cost Nano-3D200
50 μm (XY) x 50 μm (Z) 66 x 66 mm 159 x 114 x 34 mm High speed, large aperture Nano-PDQ350
75 μm (XY) x 50 μm (Z) 66 x 66 mm 159 x 114 x 34 mm High speed, large aperture Nano-PDQ375
75 μm (XY) x 50 μm (Z) 66 x 66 mm 152 x 191 x 22 mm High speed, low profile Nano-LPQ
100 μm (XY) x 20 μm (Z) to 200 μm (XY) x 50 μm (Z) 66 x 66 mm 165 x 127 x 38 mm Economical with large aperture Nano-T series
100 μm (XYZ) to 300 μm (XYZ) 66 x 66 mm 191 x 152 x 20 mm Low profile with large aperture Nano-LP series
100 μm (XYZ) to 300 μm (XYZ) 84 x 53 mm 152 x 221 x 20 mm Low profile, aperture for 3” slides Nano-LPS series

X . Y . Z . θx . θy . NanoPositioners


3-axis Linear + Tip + Tilt

Range of Motion Aperture Overall Dimensions Special Features Model PDF
50 μm (XY) x 25 μm (Z) x 1 mrad x 1 mrad 6 mm (0.25”) diameter 64 x 56 x 48 mm Smallest X-Y-Z-θX-θY stage Nano-Man5
100 μm (XYZ) x 1.2 mrad x 1.5 mrad 66 x 66 mm 152 x 191 x 20 mm Large aperture Low profile Nano-Align5-100
200 μm (XYZ) x 2.3 mrad x 3.0 mrad 66 x 66 mm 152 x 191 x 20 mm Large aperture Low profile Nano-Align5-200
300 μm (XYZ) x 3.3 mrad x 4.5 mrad 66 x 66 mm 152 x 191 x 20 mm Large aperture Low profile Nano-Align5-300

X . Y . Z . θx . θy . θz . NanoPositioners


3-axis Linear + Tip + Tilt + Rotation

Range of Motion Aperture Overall Dimensions Special Features Model PDF
100 μm (XYZ) x 1.2 mrad x 1.5 mrad x 5mrad 35 mm diameter 152 x 191 x 33 mm 6 axis motion with aperture Nano-Align6-100
200 μm (XYZ) x 2.3 mrad x 3.0 mrad x 5mrad 1.378” diameter 152 x 191 x 33 mm 6 axis motion with aperture Nano-Align6-200

MicroPositioning Stages - XY Axis

Range of Motion Step Size Linear Encoder Resolution Special Features Model PDF
25 mm (XY) NA NA Manual micrometers with 1um verniers Manual MicroStage
25 mm (XY) 95 nm (XY) 20 nm (XY) Integrated high resolution linear encoder MicroStage-20E
25 mm (XY) 25 nm (XY) 5 nm (XY) Integrated super high resolution linear encoder MicroStage-5E

Integrated NanoPositioning / MicroPositioning Stages

MicroStage (XY) Ranges of Motion MicroStage Step Size (stepper motor) or Vernier (manual micrometer) NanoPositioner (XY or XYZ) Ranges of Motion Aperture Size Model PDF
25mm single axis 95 nm step sizes with 20 nm position encoder 30 μm None Nano-SP30
25 mm (XY) manual micrometers (XY) 10 μm graduations, 1 μm vernier 2-axis or 3-axis ranges up to 300 μm (XY) or (XYZ) 66 x 66 mm Nano-View/M series
25 mm (XY) 25 nm or 95 nm step sizes (XY) with 5 nm or 20 nm position encoders (XY) 2-axis or 3-axis ranges up to 300 μm (XY) or (XYZ) 66 x 66 mm Nano-View series

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For PDF DataSheets, click on the model name (above).

We are proud to be the exclusive in-country distributor for Mad City Labs of Madison, Wisconsin,
an American manufacturer building piezo-based NanoPositioning systems since 1995.

פז"מ-טק (1991) בע"מ

RFQ שטרודל PAZAM-TECH.CO.IL

02.583.2511 +.972.2583.2511

רחוב זאב שרף 5 חדר 2
פסגת זאב מזרח
ירושלים 97842

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