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Calibration grid
(100nm tall lines, 2µm apart)
10µm x 10µm
Unidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-HS3 3-axis NanoPositioning system.
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Calibration grid
(100nm tall pegs, spaced 2µm apart)
10µm x 10µm
Unidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-HS3 3-axis NanoPositioning system.
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Fly Eye
100µm x 100µm
Bidirectional scan
PLL mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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3D Rendering of Fly Eye (above)
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Human hair
100µm x 100µm
Bidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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Uncured PMMA Pattern
10 µm x 10 µm
Bidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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3D Rendering of Uncured PMMA Pattern (above)
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Integrated circuit
100 µm x 100 µm
Bidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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Calibration Grid
40 µm x 40 µm
Unidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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3D Rendering of Calibration Grid (above)
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Calibration Grid
70 µm x 70 µm
Unidirectional scan
PLL mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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Etched structures
80 µm x 80 µm
Bidirectional scan
Self oscillation mode, constant probe signal
Z force feedback: frequency
Data taken using MadPLL™ with:
- Nano-OP30 NanoPositioning system (Z-axis),
- Nano-OP100 NanoPositioning system (XY axes).
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